Deadlines Prolonged
The deadlines for abstract and full paper submission have been extended.
Abstract submission deadline: July 5, 2009 (prolonged for 3 weeks)
Full paper submission deadline: October 10, 2009 (2 months paper authoring period)
Accordingly, dates for abstract acceptance notification and final notice of acceptance have been extended.
Abstract acceptance notification date: August 10, 2009
Final notice of acceptance: October 30, 2009
Application
ICPT2009 will accept two types of presentations: ORAL presentations and POSTER presentations. Authors can select oral or poster presentations at the time of application.
Papers submitted for the oral presentations will be reviewed, examined and decided as accepted papers or not, based on the submitted abstracts by the Program Committee.
Authors, interested in planarization/CMP technology are invited to submit contributions for presentations at the conference. Submitted papers have to be unpublished and not to be under review for any publications. All papers will be reviewed by peers and the Technical Committee of ICPT 2009 reserves the right to accept or reject papers.
The Technical Committee of ICPT 2009 strongly welcomes student’s submission. Please take this great opportunity to exchange research interests among outstanding engineers and scientists in the world.
Subjects of Interest
Papers, reports, and poster submissions are welcome on a wide range of planarization topics, such as:
- Copper/low-k CMP process and control
- Dielectric/STI CMP process and control
- CMP process integration issues and reliability
- Corrosion control during CMP process
- CMP defects
- Post CMP cleaning
- CMP consumables (polishing pads, slurries)
- CMP equipment and metrology
- CMP modeling, simulation and theory
- Chemical and physical mechanism of CMP
- Metrology, characterization and test
- Advanced CMP process control techniques
- Advances in ECD/ECP/ECMP process and tools
- Low pressure CMP
- CMP in emerging technology
- CMP application
- MEMS CMP
- 3D-IC / TSV (Through Silicon Via)
- Others
Electrical submission
The official language at all sessions is English
(1) Abstract submission
Authors have to submit the abstract. The Technical Committee will review the abstracts and will notify it’s acceptance or not. Abstract have to be submitted as electronic form in MS-Word or PDF format in two pages of specified format appeared on the conference web-site.
Please click to download the abstract format.
Please indicate the preference of oral or poster presentation when submitting the abstract. Posters are for the presentation of project or research under developing.
For those authors who cannot electronically submit their abstracts, please contact the conference secretariat on the web-site.
Abstracts will be submitted only via e-mail to : icpt2009@convention.co.jp
The subject of the e-mail should be "icpt2009- abstract".
Deadline for abstract submission is July 5, 2009. (GMT+0900)
(2) Abstract acceptance notification
The author of those abstracts accepted will be notified via e-mail by August 10, 2009.
(3) Full paper submission
Authors are requested to send camera-ready full length papers including figures, tables and references for oral and poster presentation through the conference web-site upon the accepted abstract.
Full paper must be submitted in PDF format via e-mail to : icpt2009@convention.co.jp
Please note that your full paper must be completed between 4 and 6 pages.
Accepted papers will be published in proceedings without revisions.
Deadline for full paper submission is October 10, 2009. (GMT+0900)
(4) Final notice of acceptance
Final notice of acceptance will be sent by October 30, 2009. Accepted papers must be presented by one of the authors at the conference in English, and will be limited to 20 minutes including time for discussion. All presenters are requested to register for the conference.
Important Dates
| Deadline for abstract submission | :  July 5, 2009 |
|---|---|
| Acceptance notification | : August 10, 2009 |
| Deadline for full paper submission | : October 10, 2009 |
| Final notice of acceptance | : October 30, 2009 |
Conference Fee
| Early bird registration (before September 30, 2009) | : ¥ 38,000 |
|---|---|
| Ordinary registration (After October 1, 2009 ) | : ¥ 42,000 |
| Student registration | : ¥ 8,000 |
Banquet
Conference participants are invited to the banquet on the evening of November 19, 2009.
Banquet is taken place as follows:
| Date | : November 19, 2009 |
|---|---|
| Time | : 19:00 – 20:30 |
| Place | : ARGOS, JAL Resort Sea Hawk Hotel Fukuoka 1F |
| * | Accompanied person of participant (spouse or family) is possible to attend the banquet as complimentary. |
|---|
Hotel & Tours
Hotel and tour information during the conference will be announced by May, 2009.
Contact
ICPT2009 Secretariatc/o Japan Convention Services, Inc.
Kyushu Branch Fukuoka Daido Seimei Bldg.,
12-33, Nishinakasu, Chuo-ku, Fukuoka,
810-0002 Japan
Tel: +81-92-712-6201 Fax: +81-92-712-6262
E-mail: icpt2009@convention.co.jp