
| International Executive Committee | |
|---|---|
| Kiichi Kimura | Kyushu Institute of Technology (Japan) |
| Jin-Goo Park | Hanyang University (Korea) |
| Paul Feeney | Cabot Microelectronics (USA) |
| Gerfried Zwicker | Franuhofer Institute for Silicon Technology (Germany) |
| Tsu-An Lin | Advanced System Tech (Taiwan) |
| Local Organizing Committee | |
|---|---|
| Chairperson | |
| Keiichi Kimura | Kyushu Institute of Technology |
| Vice chairperson | |
| Manabu Tsujimura | Ebara Corporation |
| Committee Members | |
| Junichi Ikeno | Saitama University |
| Akira Isobe | Nitta-Haas |
| Takao Kaga | Nissan Chemical |
| Yoshifumi Kawamoto | CASMAT |
| Seiichi Kondo | Selete |
| Kazumi Sugai | NEC Electronics |
| Yasuhiko Takeno | Global Net Corporation |
| Hirokuni Hiyama | Ebara Corporation |
| Motoshu Miyajima | Fujitsu |
| Hitoshi Morinaga | Fujimi Incorporated |
| Yohei Yamada | Hitachi Corporation |
| Hitoshi Omori | |
| Takahiro Ito | Kyushu Institute of Technology |
| Shuhei Kurokawa | Kyushu University |
| Yoji Umesaki | Kyushu University |
| Panart Khajornrungruan | Kyushu Institute of Technology |
| Committee Advisor | |
| Toshiro Doi | Kyushu University |
| Masaharu Kinoshita | Nitta-Haas |